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A large deflection translatory actuator for optical path length modulation
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2006
Conference Paper
Titel
A large deflection translatory actuator for optical path length modulation
Author(s)
Drabe, C.
Klose, T.
Schenk, H.
Wolter, A.
Lakner, H.K.
Hauptwerk
MEMS, MOEMS, and Micromachining II
Konferenz
Conference "MEMS, MOEMS, and Micromachining" 2006
DOI
10.1117/12.662853
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS