Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Micromirror Array of Monocrystalline Silicon
| IEEE Lasers and Electro-Optics Society:
IEEE/LEOS International Conference on Optical MEMS and their Applications 2006. CD-ROM : 21 - 24 Aug. 2006, Big Sky, MT
Piscataway, NJ: IEEE, 2006
ISBN: 0-7803-9562-X
ISBN: 0-7803-9561-1
pp.128-129 |
| International Conference on Optical MEMS and their Applications <2006, Big Sky/Mon.> |
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| English |
| Conference Paper |
| Fraunhofer IPMS () |