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Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials

: König, K.; Riemann, I.; Schuck, H.; Sauer, D.; Velten, T.; LeHarzic, R.


Fieret, J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; United States, Air Force, Office of Scientific Research -AFOSR-:
Photon processing in microelectronics and photonics IV : 24 - 27 January 2005, San Jose, California, USA
Bellingham, WA: SPIE, 2005 (SPIE Proceedings Series 5713)
ISBN: 0-8194-5687-X
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing <10, 2005, San José, Calif.>
Conference Paper
Fraunhofer IBMT ()