English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
A study of parylene C polymer deposition inside microscale gaps
Details
Full
Export
Statistics
Options
2006
Journal Article
Titel
A study of parylene C polymer deposition inside microscale gaps
Author(s)
Ramachandran, A.
Koch, K.P.
Hoffmann, K.P.
Junk, M.
Zeitschrift
IEEE transactions on advanced packaging
DOI
10.1109/TADVP.2007.901662
Language
English
google-scholar
View Details
Fraunhofer-Institut für Biomedizinische Technik IBMT