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Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films

: Fichtner, S.; Lofink, F.; Wagner, B.; Schönweger, G.; Kreutzer, T.-N.; Petraru, A.; Kohlstedt, H.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020. Symposium Proceedings : Virtual Conference, July 19-23, 2020
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-6753-4
ISBN: 978-1-7281-6430-4
International Frequency Control Symposium (IFCS) <2020, Online>
International Symposium on Applications of Ferroelectrics (ISAF) <2020, Online>
Conference Paper
Fraunhofer ISIT ()

The discovery of ferroelectricity in AlScN allowed the first clear observation of the effect in the wurtzite crystal structure, resulting in a material with a previously unprecedented combination of very large coercive fields (2-5 MV/cm) and remnant polarizations (70-110 μC/cm 2). We obtained initial insight into the switching dynamics of AlScN, which suggests a domain wall motion limited process progressing from the electrode interfaces. Further, imprint was generally observed in AlScN films and can tentatively be traced to the alignment of charged defects with the internal and external polarization and field, respectively. Potentially crucial from the application point of view, ferroelectricity could be observed in films with thicknesses below 30 nm - as the coercive fields of AlScN were found to be largely independent of thickness between 600 nm and 27 nm.