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Fully Automated Terahertz Layer Thickness Measurement System

: Globisch, B.; Liebermeister, L.; Kohlhaas, R.B.; Deninger, A.; Anklamm, L.; Mästle, R.


Markelz, A. ; Institute of Electrical and Electronics Engineers -IEEE-:
45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 : November 8-13, 2020, a virtual event hosted from Buffalo, New York, USA
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-6621-6
ISBN: 978-1-7281-6620-9
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) <45, 2020, Online>
Conference Paper
Fraunhofer HHI ()

We present a fully automated terahertz sensor system for layer thickness measurements of paint and coatings. The core of the instrument is a fiber coupled THz TDS platform that achieves a spectral bandwidth > 6 THz and a peak dynamic range of more than 100 dB in less than 20 s, which sets a new record for the signal quality of THz TDS systems. The system enables the characterization of up to five-layer coatings with individual thicknesses between 3 μm and several hundred microns. The accuracy of the thickness determination is better than 500 nm.