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Acquisition Time Reduction in Large-Area, High-Resolution Scanning Electron Microscopy-Analysis of Nanometer Integrated Circuits Through Deep Learning-Based Super Resolution

 
: Erbis, Joscha
: Gengenbach, Ulrich; Gieser, Horst

Karlsruhe, 2021, 159 pp.
Karlsruhe, Inst. für Technologie (KIT), Master Thesis, 2021
English
Master Thesis
Fraunhofer EMFT ()
chip scanning; deep learning; super-resolution; integrated circuits

: http://publica.fraunhofer.de/documents/N-638403.html