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Inkjet printing of dielectric layers with high relative permittivity for digital microfluidics

: Schönfelder, T.; Kemper, F.; Pohle, L.; Reif, M.; Tienken, M.; Beckert, E.; Tünnermann, A.


Gray, Bonnie L. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Microfluidics, BioMEMS, and Medical Microsystems XIX : 6-12 March 2021, Online Only, California, United States
Bellingham, WA: SPIE, 2021 (Proceedings of SPIE 11637)
Paper 1163708, 5 pp.
Conference "Microfluidics, BioMEMS, and Medical Microsystems" <19, 2021, Online>
Conference Paper
Fraunhofer IOF ()
dielectric materials; inkjet printing; Lab-on-a-Chip; Microfluidics

Digital microfluidics (DMF) is an emerging technology for liquid-handling of picoliter-to microliter-sized droplets. It enables individual control over droplets by applying electrical fields to an array of electrodes. Standard DMF devices include four key components: substrates, electrodes, a dielectric layer and hydrophobic layers. This work outlines the fabrication of dielectric layers with a high relative permittivity by inkjet printing. The layers consists of OrmoComp, silver nanoparticles and different solvents. OrmoComp has a relative permittivity of about 2.5. By adding 24.2 vol% of silver nanoparticles the relative permittivity rises to 76. Thereby the operating voltage can be reduced drastically.