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Self-aligned Selective Emitter for PERC Based on Inkjetable UV-Polymer

 
: Efinger, R.; Kafle, B.; Demel, K.; Ellahi, T.; Jahn, M.; Messmer, M.; Horzel, J.; Zimmer, M.; Kluska, S.; Shepherd, W.; Pickrell, M.; Hermans, J.; Lohmüller, S.; Lohmüller, E.; Keding, R.

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Fulltext urn:nbn:de:0011-n-6339765 (1.0 MByte PDF)
MD5 Fingerprint: d390b1126b74333a9f843c793b4a1ce2
Created on: 21.4.2021


Pearsall, Nicola (ed.):
37th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2020 : 07-11 September 2020, Online Conference
München: WIP, 2020
ISBN: 3-936338-73-6
pp.388-393
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <37, 2020, Online>
English
Conference Paper, Electronic Publication
Fraunhofer ISE ()
Photovoltaik; etching process; inkjet printing; PERC; selective emitter; Silicium-Photovoltaik; Dotierung und Diffusion; Oberflächen: Konditionierung; Passivierung; Lichteinfang; Metallisierung und Strukturierung

Abstract
In this study, we investigate and demonstrate the general feasibility of a new approach for a self-aligned selective emitter process technology for passivated emitter and rear cell (PERC) technology based on inkjet printing of an UV-polymer ink in combination with plating for metallization. First, we present the major findings about the single process development of inkjet printing (minimum printed structures of 36 μm), emitter etch-back (from Rsh = 80 Ω/sq to 144 Ω/sq with an etch time of 10 s), low temperature passivation (depositions temperatures of up to 250°C), a lift-off process (at elevated temperatures of 600°C) and demonstrate that the UV-polymer ink shows sufficient chemical and thermal stability to the processes involved. Finally, the successful integration into the PERC process sequence with upscaling to an industrial wafer size M2 and a first working cell device with an efficiency = 19.68% is demonstrated. In comparison, a conventional mask&etch selective emitter approach using inkjet printing of an hotmelt ink in combination with a semi-automated enhanced alignment algorithm between inkjet and screen printing is processed in parallel showing = 21.54% and a gain of = 0.16%abs compared to PERC cell with homogeneous emitter.

: http://publica.fraunhofer.de/documents/N-633976.html