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Piezoelectric MEMS sensors for the detection of weak magnetic signals with adjustable resonance

: Su, J.; Niekiel, F.; Fichtner, S.; Kirchhof, C.; Meyners, D.; Quandt, E.; Wagner, B.; Lofink, F.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
MikroSystemTechnik Kongress 2019 : Mikroelektronik - MEMS-MOEMS - Systemintegration - Säulen der Digitalisierung und künstlichen Intelligenz, 28. - 30. Oktober 2019, Berlin
Berlin: VDE-Verlag, 2019
ISBN: 978-3-8007-5090-0
ISBN: 978-3-8007-5129-7
MikroSystemTechnik Kongress <2019, Berlin>
Conference Paper
Fraunhofer ISIT ()

In this paper, two highly sensitive MEMS magnetic field sensors based on magnetoelectric effect of piezoelectric-magnetostrictive composites have been investigated. High sensitivities of up to 424 V/T, low limit of detections of down to 128 pT/ Hz0.5 in resonance have been measured. High quality factors of more than 1600 for both sensors are achieved. The presented sensors display a frequency tuning effect with a frequency shift of up to 0.5 Hz/V, enabled by applying a DC voltage to their integrated piezoelectric actuators. The presented magnetic field sensors with adjustable resonance are of particular interest for vector field sensors or sensor arrays in bio-magnetic applications.