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Design and fabrication of single, smooth and broadband chirped mirrors with a top nano-porous layer

: Ma, P.; Szeghalmi, A.; Schulz, U.; Rickelt, F.; Beladiya, V.; Zimmermann, P.; Li, L.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings : Part of Optical Interference Coatings Conference : 2-7 June 2019, Santa Ana Pueblo, New Mexico, United States
Washington, D.C.: OSA, 2019
ISBN: 978-1-943580-58-3
Paper ThB.3
Conference" Optical Interference Coatings" (OIC) <2019, Santa Ana Pueblo/NM>
Conference Paper
Fraunhofer IOF ()

The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.