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Polygon scanner based ultra-short pulse laser processing for continuous manufacturing

: Priwisch, M.; Dormann, S.; Zontar, D.; Hönninger, C.; Penning, L.; Loor, R. de; Bruneel, D.; Brecher, C.


Optical Society of America -OSA-, Washington/D.C.:
Applied Industrial Optics: Spectroscopy, Imaging and Metrology : 8-10 July 2019, Washington, DC, United States
Washington, D.C.: OSA, 2019 (OSA Technical digest series)
ISBN: 978-1-943580-65-1
Paper W3A.3
Meeting "Applied Industrial Optics - Spectroscopy, Imaging and Metrology" (AIO) <2019, Washington/DC>
Conference Paper
Fraunhofer IPT ()

Enabling of continuous photomasking using a pulsed laser source and polygon scanners to achieve high repetition rates and pulse energy, precise beam guiding and stable handling of the moving web with the applied photomask resist.