Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Polygon scanner based ultra-short pulse laser processing for continuous manufacturing

 
: Priwisch, M.; Dormann, S.; Zontar, D.; Hönninger, C.; Penning, L.; Loor, R. de; Bruneel, D.; Brecher, C.

:

Optical Society of America -OSA-, Washington/D.C.:
Applied Industrial Optics: Spectroscopy, Imaging and Metrology : 8-10 July 2019, Washington, DC, United States
Washington, D.C.: OSA, 2019 (OSA Technical digest series)
ISBN: 978-1-943580-65-1
Paper W3A.3
Meeting "Applied Industrial Optics - Spectroscopy, Imaging and Metrology" (AIO) <2019, Washington/DC>
English
Conference Paper
Fraunhofer IPT ()

Abstract
Enabling of continuous photomasking using a pulsed laser source and polygon scanners to achieve high repetition rates and pulse energy, precise beam guiding and stable handling of the moving web with the applied photomask resist.

: http://publica.fraunhofer.de/documents/N-630117.html