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Piezoresistive microcantilever for gravimetric particulate matter monitoring

: Bertke, M.; Xu, J.; Setiono, A.; Peiner, E.; Kirsch, I.; Uhde, E.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
MikroSystemTechnik Kongress 2019 : Mikroelektronik - MEMS-MOEMS - Systemintegration - Säulen der Digitalisierung und künstlichen Intelligenz, 28. - 30. Oktober 2019, Berlin
Berlin: VDE-Verlag, 2019
ISBN: 978-3-8007-5090-0
ISBN: 978-3-8007-5129-7
MikroSystemTechnik Kongress <2019, Berlin>
Conference Paper
Fraunhofer WKI ()

A low-mass (nanogram) gravimetric direct-reading cantilever sensor is described for high-resolution portable airborne particulate matter detection and size classification. Owing to the small cantilever size, the piezoresistors for mass-induced sensing resonance-frequency shifts are connected to the cantilever as lateral struts. The cantilever is arranged over a microchannel through which particle-laden air is conducted. For size-selective deposition of charged particles on the cantilever an electrostatic field is applied between it and the microchannel wall. Realised sensors are tested against a standard particle sizer instrument in a chamber with carbon nanoparticles of mass concentrations of ≤10 myg/m3.