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Mikroozon - thermal flow sensors and ozone generating electrodes for water cleaning applications

: Knieling, T.; Laske, N.; Rasmusssen, M.; Samson, J.; Muehler, T.; Behrendt-Fryda, B.; Blohm, L.; Nebling, E.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
MikroSystemTechnik Kongress 2019 : Mikroelektronik - MEMS-MOEMS - Systemintegration - Säulen der Digitalisierung und künstlichen Intelligenz, 28. - 30. Oktober 2019, Berlin
Berlin: VDE-Verlag, 2019
ISBN: 978-3-8007-5090-0
ISBN: 978-3-8007-5129-7
MikroSystemTechnik Kongress <2019, Berlin>
Conference Paper
Fraunhofer ISIT ()

The public funded project "Mikroozon" aims at developing a small device to generate ozone-rich water for sanitizing purposes, e.g. in household applications. In order to build an affordable system, innovative diamond-coated electrodes are combined with a low-cost multi-sensor chip. The sensor measures the upstream water flow quality and the electronic signals are led to an open-loop control circuit which controls the electrodes activity. Sensors and electrodes are fabricated using thin-film and micro-machining processes.