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2001
Conference Paper
Titel
Investigations of Alignment and Positioning Principles for Optical Detectors
Abstract
Microoptical systems are typically hybrid systems. The cause is the great variance of materials, shapes and basic fabrication technologies. Fig. 1 shows some parts of the assembly process. The alignment of the optical detectors is essential for the performance of optical systems, e.g. for 3?chip cameras. Two methods for alignment are known: passive and active. The passive alignment uses stop pints, is effective and the accuracy is limited near by some microns. The active method is oriented on the shape of the components or on the optical performance (transmission or lost of energy, image quality). Advantage is the accuracy in sub mu m range, but the costs are higher than the other one. Our alignment system has an uncertainty < 0.5 microns in the image plane and 5 microns in the focal plane.