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A new type of 3D micro machining system

Properties and applications
: Schubert, A.; Schulz, B.; Blank, G.

Fulltext urn:nbn:de:0011-n-626152 (1.8 MByte PDF)
MD5 Fingerprint: b85fdc1f3a4f19be1a966da906fe47bb
Created on: 31.3.2011

Micari, F.; Filice, L. ; University of Calabria, Rende:
10th CIRP International Workshop on Modeling of Machining Operations. Proceedings : August 27-28, 2007, Reggio Calabria, Italy
Rende: University of Calabria, Department of Mechanical Engineering, 2007
ISBN: 978-88-95267-04-3
International Workshop on Modeling of Machining Operations <10, 2007, Reggio Calabria>
Conference Paper, Electronic Publication
Fraunhofer IWU ()
Höchstpräzisionsbearbeitung; Mikrobearbeitung; Mikrofräsen; 3D-Mikrobearbeitungssystem; Präzisions-Linearantrieb; highest precision manufacturing; micromachining; micro milling; 3D-micro machining system; precision linear drive

In 2006 a highest precision test facility for micro machining was put into operation at the Fraunhofer IWU laboratory of highest precision and micro manufacturing. It is the prototype of the new developed 3D micro machining system PROSYS as a result of joint research activities between Fraunhofer IWU and LPKF Motion & Control in the last years. The system concept bases on an air beared XYZ drive system in a portal construction, consisting of a 2D-planar stage and a precision Z-axis with air bearings and a linear motor. The system allows machining operations like micro milling in a range of 100 x 100 x 100 mm3 with a repetition accuracy of ± 0.1 µm and a positioning accuracy of ± 0.5 µm. The resolution in motion is able down to 20 nanometers. In this article an overview about the first comprehensive test program at Fraunhofer IWU will be given. In the main focus lay the investigation of the application potential for micro milling in hardened steel. Therefor the machining system was provided with an IBAG high-frequeny spindle system for 60.000 rpm's and a special designed spindle holder made of invarÒ and an EROWA FTS chuck. The used optical measuring system consists of 2 measuring cameras and a laser-triangulation sensor. The extremely accuracy properties could be proven by milling highest precision calibration standards, made of high-alloyed steel. The milled structures are postive and negative micro pyramides and graduated micro cylinders over an area of 30 x 30 mm2.