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EUV multilayer optics at the Fraunhofer IOF

: Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()
thin film; coating; deposition and fabrication; optical property

The accurate deposition of high reflective, laterally graded, thermal and radiation stable multilayers mirrors on super polished substrates is one of the major challenges of EUVL development today. The development of multilayer mirrors for EUVL at the Fraunhofer IOF is presented in this paper.