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Aluminium-rich Ti(1-x)Al(x)N coatings by CVD

 
: Endler, I.; Herrmann, M.; Naupert, M.; Pitonak, R.; Ruppi, S.; Schneider, M.; Berg, H. van den; Westphal, H.

European Powder Metallurgy Association -EPMA-:
PM in Belgium, a crossroads in industry development. Vol.1: Hard materials : Euro PM 2006 Congress & Exhibition, 23 - 25 October 2006, Ghent, Belgium. Proceedings
Shrewsbury: EPMA, 2006
ISBN: 1-89907-232-2
ISBN: 978-1-89907-232-3
pp.219-224
European Congress and Exhibition on Powder Metallurgy (EURO PM) <2006, Ghent>
English
Conference Paper
Fraunhofer IKTS ()
experimentelle Untersuchung; CVD-Beschichtung; Niederdruckgasphasenabscheidung; Vickershärte; Mikrohärte; Nanoeindringprüfung; Hartmetall; Substrat; Gusseisen; Stahl; Inconel; Plasma-CVD; Röntgenbeugung; Rasterelektronenmikroskopie; Young-Modul; energiedispersive Röntgenspektrometrie (EDXS); kubischflächenzentriertes Gitter; hexagonale Kristallstruktur; Konzentrationseinfluss; physikalisches Aufdampfen; Titannitrid; Reiben=Aufbohren; Drehen=Bearbeiten; Feinkorn; Grobkorn; Oxidationsbeständigkeit; Titanaluminiumnitrid; Gitterkonstante; Kristallgitter; Verschleißfestigkeit

Abstract
The performance of cutting tools can be increased by wear resistance coatings with improved properties. Up to now hard Ti(1-x)Al(x)N coatings with the NaCl structure have been prepared industrially by PVD (physical vapour deposition) processes with a maximum x=0.65. Higher x lead to the co-deposition of the softer hexagonal wurtzite phase. In this work the preparation of fcc-TiAlN (face centered cubic) coatings with x up to 0.9 by thermal CVD (chemical vapor deposition) is described for the first time. A LPCVD (low pressure chemical vapor deposition) process using TiCl4, AlCl3, NH3, H2, N2 and Ar is applied. At deposition temperatures between 700 deg C and 900 deg C very hard Ti(1-x)Al(x)N layers with 0.8 < x < 0.9 were prepared. The layers possess a high hardness between 3000 HV and 3300 HV and a Young's modulus up to 540 GPa. In first wear tests a high performance of the CVD-Ti(1-x)Al(x)N is observed. Coated inserts show a reduced wear by 30 % in comparison with a state-of-the-art PVD coating in reaming of steel and cast iron.

: http://publica.fraunhofer.de/documents/N-62508.html