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Echelle grating with improved polarization characteristics used for Earth observation

: Sadlowski, S.; Harzendorf, T.; Schwinde, S.; Burmeister, F.; Michaelis, D.; Flügel-Paul, T.; Zeitner, U.


Navarro, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV : 14-22 December 2020, Online Only
Bellingham, WA: SPIE, 2020 (Proceedings of SPIE 11451)
ISBN: 978-1-5106-3689-7
ISBN: 978-1-5106-3690-3
Paper 114511D, 9 pp.
Conference "Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation" <4, 2020, Online>
Conference Paper
Fraunhofer IOF ()
anisotropic etching; e-beam lithography; Echelle-grating; reflection grating; silicon

An Echelle-grating specifically developed for the space borne measurement of earth's atmospheric CO2 concentration is presented. It has a line density of ∼170L/mm and is manufactured on a thick crystalline silicon substrate using electron beam lithography. The echelle profile is realized using a highly anisotropic chemical etching process, which stops on the <111> crystallographic planes of the crystal. The established manufacturing process allows perfect linear grating facets with negligible corner rounding of the profile. The important property of showing a low polarization sensitivity of the diffraction efficiency is achieved by a special design and technology for applying the gold coating of the grating which intentionally leaves one grating facet uncoated.