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UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings

 
: Gliech, S.; Wendt, R.; Duparre, A.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
English
Conference Paper
Fraunhofer IOF ()
instrumentation; measurement; metrology; scattering measurement; thin films; optical properties

Abstract
The capabilities of our optimized angle resolved and total light scattering measurement
systems in the ultraviolet to near-infrared spectral ranges are described and examples of
investigations on multilayer gratings and diamond turned optics given.
©2007 Optical Society of America

: http://publica.fraunhofer.de/documents/N-61927.html