Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Scanning force microscopy of coatings and nanostructured surfaces

 
: Flemming, M.; Duparre, A.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
English
Conference Paper
Fraunhofer IOF ()
scanning microscopy; metrology; coating; roughness

Abstract
The capability of scanning force microscopy and subsequent PSD data evaluation for
the investigation of functional surface nanostructures is demonstrated. Critical effects emerging
from measurements in the nanometer scale are discussed.

: http://publica.fraunhofer.de/documents/N-61926.html