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In-Line, Real-Time Laser Process Monitoring Using Low-Coherence Interferometry

: Riedel, Christoph A.; Ackermann, Philippe; Kunze, Rouwen E.; Schmitt, Robert H.

Fulltext (PDF; )

Wissenschaftliche Gesellschaft Lasertechnik -WLT-:
Lasers in Manufacturing, LiM 2019. CD-ROM : Munich ICM, Internationales Congress Center München, Germany, June 24-27, 2019 : World of Photonics Congress
Erlangen: WGL, 2019
7 pp.
Lasers in Manufacturing Conference (LiM) <2019, Munich>
World of Photonics Congress <2019, Munich>
European Commission EC
723805; PoLaRoll
Conference Paper, Electronic Publication
Fraunhofer IPT ()
laser material processing; high-precision measuring; in-line metrology; process monitoring; process feedback control

With the ubiquity of laser material processing as a high-accuracy tool in modern production, in-line and real-time monitoring of such process becomes increasingly important. A key technology for such monitoring is low-coherence interferometry, which can be implemented into the same optical beam path as the process laser. This metrology system integration has to be custom tailored for each individual system. In recent years, we demonstrated successful integrations of LCI into several different laser material processing methods, such as fixed focus optics, scan heads and polygon scanners. We give an overview over the boundary conditions of such an integration and the challenges that were encountered. The results pave the way for future real-time process feedback for self-focusing and self-correcting laser process systems.