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2020
Journal Article
Titel
Cross-Linked Gold Nanoparticle Composite Membranes as Highly Sensitive Pressure Sensors
Abstract
In this article, highly sensitive differential pressure sensors based on free-standing membranes of cross-linked gold nanoparticles are demonstrated. The nanoparticle membranes are employed as both diaphragms and resistive transducers. The elasticity and the pronounced resistive strain sensitivity of these nanometer-thin composites enable the fabrication of sensors achieving high sensitivities exceeding 10-3 mbar-1 while maintaining an overall small membrane area. Furthermore, by combining micro-bulge tests with atomic force microscopy and in situ resistance measurements the membranes electromechanical responses are studied through precise observation of the concomitant changes of the membranes topography. The study demonstrates the high potential of free-standing nanoparticle composites for the fabrication of highly sensitive force and pressure sensors and introduces a unique and powerful method for the electromechanical investigation of these materials.
Author(s)
Kunze, Svenja
Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
Rebber, Matthias
Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
Schulz, Norbert
Institute of Microsystems Technology, Hamburg University of Technology, Eißendorfer Str. 42, 21073 Hamburg, Germany
Riekeberg, Svenja
Institute of Microsystems Technology, Hamburg University of Technology, Eißendorfer Str. 42, 21073 Hamburg, Germany
Trieu, Hoc Khiem
Institute of Microsystems Technology, Hamburg University of Technology, Eißendorfer Str. 42, 21073 Hamburg, Germany