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Tolerances for microtechnologies

: Westkämper, E.

Osanna, P.H. ; International Measurement Confederation -IMEKO-, Technical Committee on Robotics -TC 17-; Österreichische Gesellschaft für Meß- und Automatisierungstechnik:
XVI IMEKO World Congress. Proceedings. Vol. 2: Topic 1, Education and training in measurement and instrumentation. Topic 2, Phonotic measurements. Topic 20, Micro and nano technology
Wien, 2000
ISBN: 3-901888-04-7
IMEKO World Congress <16, 2000, Vienna>
Conference Paper
Fraunhofer IPA ()
Mikrotechnologie; Toleranz; Messen

Microsystems are miniaturised technical components in dimensions of mm, which consist of mechanical and electronic or optic functions and functional elements. Microsystems are used as sensors and actuators in different applications for automobiles, medical techniques or peripheral computer equipment. They are manufactured in series or small series. Sensors, actuators and many technical microproducts require components with small dimensional form and surface tolerances in the µm range. If one includes the physical processes, precision starts to reach nano levels. The tolerances of microsystems are defined as functional tolerances. This paper deals with requirements for tolerancing systems for miniaturised components and functional elements. The different criteria and systems as well as basics for possible standards are elaborated. It is even a contribution to the discussion about the necessity of new tolerancing systems, questions of calibration and the usage of measuring systems to detect deviations in microgeometry, physical characterisation and integration of measurement in industrial manufacturing systems.