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Performance specification of areal surface texture instruments exemplified by a self-built WLI

: Bulun, Georgis; Eifler, Matthias; Hering, Julian; Freymann, Georg von; Seewig, Jörg


North Morris, M.B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Interferometry XX : 24 August-4 September 2020, online only, United States
Bellingham, WA: SPIE, 2020 (Proceedings of SPIE 11490)
ISBN: 978-1-5106-3786-3
ISBN: 978-1-5106-3787-0
Paper 114900H, 17 pp.
Interferometry Conference <20, 2020, Online>
Conference Paper
Fraunhofer ITWM ()

The calibration of optical surface topography measuring instruments ensures the comparability of the resulting surface topographies. Such comparability is also desirable for self-built optical microscopes in order to optimize these instruments with regard to their systematic and stochastic measurement uncertainty. However, there is not yet a fixed set of standards in the field of interference microscopy as in the field of stylus instruments that describes methods for their calibration, verification, adjustment and performance specification [1] [2]. The associated standard for optical measuring instruments is still in preparation in the corresponding ISO working group. There is the guideline according to VDI/VDE 2655 Sheet 1.1, for the calibration of interference microscopes for surface texture measurement. This guideline is essentially a transfer of methods that origin from the calibration of stylus instruments [1]. Thus, it describes a profile-like calibration and does specifically consider areal properties of interference microscopes. The field of areal calibration is still work in progress in the international standardization. The ISO 25178-600 that was recently published defines the basic metrological characteristics of areal surface topography measuring instruments [3]. In our study, we describe the optimization and performance specification of a self-built white light interference microscope based on methods that were developed for instrument calibration. For the performance specification we use the metrological characteristics of ISO 25178-600 that are imaged with the help of a previously developed Universal Calibration Artefact for areal calibration [4]. The results of the metrological characteristics are compared with a commercially available white light interferometer (WLI).