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High-NA Confocal Measurement by Diffractive Optical Elements

: Li, Zheng

Fulltext urn:nbn:de:0011-n-6086899 (2.0 MByte PDF)
MD5 Fingerprint: 55729710419768ceb1fb528794a2a249
Created on: 17.11.2020

Beyerer, Jürgen (Ed.); Zander, Tim (Ed.):
Joint Workshop of Fraunhofer IOSB and Institute for Anthropomatics, Vision and Fusion Laboratory 2019. Proceedings : July, 29 to August, 2, 2019, Triberg-Nussbach, Germany
Karlsruhe: KIT Scientific Publishing, 2020 (Karlsruher Schriften zur Anthropomatik 45)
ISBN: 978-3-7315-1028-4
DOI: 10.5445/KSP/1000118012
Fraunhofer Institute of Optronics, System Technologies and Image Exploitation and Institute for Anthropomatics, Vision and Fusion Laboratory (Joint Workshop) <2019, Triberg-Nussbach>
Conference Paper, Electronic Publication
Fraunhofer IOSB ()

Diffractive optical elements (DOEs) can produce high-numerical-aperture (NA)spots over a large field. They can be combined with a low-NA objective to measure a large area with high resolution. This work shows experiments of using DOEs in reflection confocal microscope to resolve small structures beyond the capability of the objective. Both qualitative and quantitative results have shown enhancement in lateral and axial resolution by the application of the DOEs, which also agrees to the imaging theory of confocal microscopes.