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2006
Journal Article
Titel
High-speed data storage and processing for projection mask-less lithography systems
Abstract
Advantageous optical interconnect technology was chosen for the projection mask-less lithography application to transmit the exposure data to the blanking plate electronics inside a high-voltage vacuum area. Ensuring continuous and reliable operation requires a dedicated preparation and buffering of the transmission data. This paper presents the implementation aspects and the design of a high-speed buffer system based on the field programmable gate array (FPGA) technology. The high data rates and the highly parallelized system operation require a specific architecture and careful signal integrity design for proper functionality.
Tags
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feldprogrammierbare-Gate-Array-Schaltung
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Hochgeschwindigkeit
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Lithographie
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optische Datenverarbeitung
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optische Verbindung
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Parallelverarbeitung
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buffer circuit
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field programmable gate arrays
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high-speed technique
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lithography
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optical information processing
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optical interconnections
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optical links
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parallel processing