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Ceramic microhotplates for low power metal oxide gas sensors

: Samotaev, Nikolay; Oblov, Konstantin; Gorshkova, Anastasiya; Fritsch, Marco; Mosch, Sindy; Vinnichenko, Mykola; Trofimenko, Nikolai; Kusnezoff, Mihails; Fuchs, Franz-Marin; Wissmeier, Lena


Materials today. Proceedings 30 (2020), Part 3, pp.448-451
ISSN: 2214-7853
International Scientific Conference on Materials Science "Composites, Alloys and Materials Chemistry" (MS-CAMC) <2019, Sankt Petersburg>
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Journal Article, Conference Paper
Fraunhofer IKTS ()
MEMS; metal oxide gas sensor; inkjet printing technology; Laser Technology and Physics; ceramics

The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock facilities, fish farming, forestry, food-storage and horticulture, where they support future-oriented plant production (smart agriculture). The central part of a MOX gas sensor is a micro-hotplate, which is mainly responsible for the sensor power consumption at operating temperatures from 450 °C to 600 °C. Under harsh environmental conductions, ceramic materials are the best choice for the micro-hotplate substrate and sensor housing (ceramic MEMS) in combination with platinum metallization for the heater. To realize such gas sensors with low power consumption (<200 mW) were developed of miniaturized printable heaters on ultra-thin ceramic membranes.