Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

High temperature implantation of aluminum in 4H silicon carbide

Hochtemperatur-Implantation von Aluminium in 4H Siliciumcarbid
 
: Rambach, M.; Bauer, A.J.; Ryssel, H.

:

Wright, N.:
Silicon Carbide and Related Materials 2006. Proceedings of the 6th European Conference on Silcon Carbide and Related Materials : Newcastle upon Tyne, UK, September 2006
Stafa-Zurich: Trans Tech Publications, 2007 (Materials Science Forum 556)
ISBN: 0-87849-442-1
pp.587-590
European Conference on Silicon Carbide and Related Materials (ECSCRM) <6, 2006, Newcastle>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-60092.html