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Flexible fabrication of three-dimensional multi-layered microstructures using a scanning laser system

: Yu, H.; Li, B.; Zhang, X.


Sensors and Actuators. A 125 (2006), No.2, pp.553-564
ISSN: 0924-4247
Journal Article
Fraunhofer IPT ()

In this paper, we developed a scanning laser system, which allows rapid processing of freeform multi-layered microstructures. More importantly it enables rapid prototyping of three-dimensional (3D) microdevices at low cost. The capabilities of three-dimensional manufacturing, inclined patterning, and multi-layered manufacturing have been demonstrated. Specifically, both in-plane and out-of-plane processing is feasible using spot-by-spot controllable laser pulsing. The laser processing perpendicular to the specimen surface is realized by fine tuning the focus level and laser intensity. A large number of microfluidic components such as cantilever beams, embedded channels and other shapes requiring gaps between layers are demonstrated in a single layer. Compared to the existing manufacturing techniques, our direct laser writing method greatly simplifies fabrication processes, potentially reducing the design-to-fabrication cycle to a few hours.