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Roll to Roll Deposition of Transparent Electrodes on Permeation Barrier Coatings

: Fahland, Matthias; Vogt, Tobias; Meyer, Uwe; Prager, Nicole; Fahlteich, John

SVC Bulletin (2020), Summer 2020, pp.38-42
European Commission EC
H2020; 688093; PI-SCALE
Journal Article
Fraunhofer FEP ()
OLED; ITO; roll-to-roll sputtering; PET film

The European project PI-SCALE has set an objective to create a virtual pilot manufacturing line for various types of OLED lighting devices. An important part of this virtual pilot line is the roll-to-roll sputtering of the anode layer. An indium tinoxide (ITO) layer with a sheet resistance below 30 Ωsq (ohm/square) was sputtered onto a continuously moving polyethylene terephthalate (PET) film substrate using a rotatable magnetron. The sputtering performance of a bonded ITO target was compared to the performance of a plasma sprayed ITO target. It was demonstrated that the variation of the hydrogen content of the sputtering gas atmosphere can serve as a powerful parameter for the optimization of the layer properties. This gas was varied between zero and ten percent of the total gas flow. The PET film was equipped with a planarizing layer and a permeation barrier coating on top of it. It was shown how the permeation barrier is prevented from getting deteriorated by conveying the film. The removal of a protective interleaf film directly before entering the sputtering zone turned out to be decisive for the layer quality. The same holds true for the application of a protective interleaf immediately after leaving the sputtering zone. By applying these two steps, the permeation barrier could be kept below 1×10-3 g/m2day, which is the lower limit of the applied coulometric measurement device.