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Investigation of the oxide film formed on solid-state sintered silicon carbide ceramics at high anodic potentials

: Schneider, Michael; Simunkova, Lenka; Michaelis, Alexander; Noeske, Michael; Aniol, Jonas; Thiel, Karsten

Bähre, Dirk (Herausgeber) ; Univ. des Saarlandes, Institut für Produktionstechnik:
15th International Symposium on Electrochemical Machining Technology, INSECT 2019. Proceedings : November 14-15, 2019, Institute of Production Engineering, Saarland University, Saarbrücken, Germany
Saarbrücken: Universität des Saarlandes, 2019
ISBN: 978-3-00-064086-5
ISBN: 3-00-064086-X
International Symposium on Electrochemical Machining Technology (INSECT) <15, 2019, Saarbrücken>
Conference Paper
Fraunhofer IKTS ()
Oxidschicht; Zwischenphase; Anodenspannung; Siliciumcarbidkeramik; Fester Zustand; Oxid; Siliciumcarbid; Gasentwicklung; alkalische Lösung; Dünnfilm

The present work is dealing with the formation and constitution of a thin oxide film formed at high anodic voltage on a solid-state sintered silicon carbide ceramic. Electrochemical experiments and material diagnostic assessing the film surface and interphase to the substrate, mainly TEM coupled with EDX, are complementarily applied to explain seemingly contradictory results of oxide formation and gas evolution. It is shown that a 30 nm thick oxide film is formed due to a polarization at 30 V (3 M Ag/AgCl) in alkaline solution. The EDX data suggest an oxide film consisting of SiOxCy.