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Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes

: Ghicov, A.; Macak, J.M.; Tsuchiya, H.; Kunze, J.; Haeublein, V.; Frey, L.; Schmuki, P.


Nano Letters 6 (2006), No.5, pp.1080-1082
ISSN: 1530-6984
ISSN: 1530-6992
Journal Article
Fraunhofer IISB ()

Self-organized anodic titaniananotube layers were doped with nitrogen successfully using ion implantation. Photoelectrochemical measurements combined with XRD measurements show that the damage created by ion bombardment ( that leads to a drastic decrease of the photoconversion efficiency) can be "annealed out" by an adequate heat treatment. This results in a N-doped crystalline anatase nanotube structure with strongly enhanced photocurrent response in both the UV and the visible range.