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Thickness management in three-dimensional laser manufacturing of suspended structures in a single SU-8 layer

: Li, B.; Gueit, A.; Sharon, A.


Review of scientific instruments 77 (2006), No.6, Art. 065103, 5 pp.
ISSN: 0034-6748
ISSN: 1089-7623
Journal Article
Fraunhofer IPT ()

Cantilevers, embedded channels, microcavities, and other high-aspect-ratio geometries requiring gaps between layers are essential to microfluidic components used for biotech/biomedical applications. Intensive efforts have been expanded in the development of novel approaches for efficiently manufacturing suspended structures. We have recently demonstrated a three-dimensional (3D) fabrication technique for rapid processing of microfluidic structures using a scanning laser system [B. Li Appl. Phys. Lett. 85, 2426 (2004)]. This technique enables spot-by-spot laser pulsing for both in-plane and in-depth (parallel to film thickness) processing. Its maskless feature allows rapid prototyping of multilevel microfluidic structures at low cost. This article describes our latest results in thickness management using the 3D laser manufacturing technique. Suspended beams of various thicknesses have been fabricated by modifying grid size, laser energy, and degree of focus. Towards this end, we have demonstrated a microfluidic system with a functional microvalve in a single SU-8 layer.