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Quasipassive positioning platform for nanoscale management of in-plane motion

: Li, B.; Zhu, Y.; Sharon, A.


Applied Physics Letters 89 (2006), No.4, Art. 043110, 3 pp.
ISSN: 0003-6951
ISSN: 1077-3118
Journal Article
Fraunhofer IPT ()

As leading edge technology pursues a common trend of working on smaller and smaller scales, there is increasing demand on the motion management at the nanometer range. In this letter, we report a two-axis quasipassive positioning device capable of four degrees of freedom in-plane motion. The concept comprises of a platform suspended by tensile stressed flexure elements on either side. By selectively trimming the stress elements, the equilibrium position can be biased to one side or another, enabling nanoscale movement between the suspended platform and the base. Focused ion beam experiment demonstrates that such platform enables positioning accuracy on the order of tens of nanometers.