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Rate and Composition Control for Plasma-assisted EB-PVD Processes by Optical Emission Spectroscopy

: Zimmermann, Burkhard; Mattausch, Gösta; Metzner, Christoph

SVC Bulletin (2020), Spring 2020, pp.64-71
Journal Article
Fraunhofer FEP ()
coating; SAD-process; EB-PVD processes; hollow cathode; plasma

Increasing performance requirements of coatings on components and tools drive new approaches and developments, e.g., in the field of thermal (TBC) and environmental (EBC) barrier coatings on turbine components, characterized by more complex compositions and a desire for morphology control. Consequently, corresponding PVD processes become more challenging and call for advanced monitoring and control means.