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Influence of seed layers on optical properties of aluminum in the UV range

 
: Stempfhuber, S.; Felde, N.; Schwinde, S.; Trost, M.; Schenk, P.; Schröder, S.; Tünnermann, A.

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Optics Express 28 (2020), No.14, pp.20324-20333
ISSN: 1094-4087
English
Journal Article, Electronic Publication
Fraunhofer IOF ()
optical coatings; metal fluorides; Lanthanum Trifluoride; metallic thin films; aluminum coated steel

Abstract
The potential of titanium and copper seed layers to enhance the optical properties of aluminum films for ultra-violet (UV) applications is analyzed. The seed layers significantly influence the initial layer growth of aluminum films. For the titanium-seeded aluminum, a surface roughness of 0.34 nm was observed. UV spectral reflectance measurements showed an average higher reflectivity of 4.8% for wavelengths from 120 nm to 200 nm for the aluminum film grown on the titanium seed layer. Furthermore, the titanium-seeded aluminum coatings were stable at an elevated temperature of 225°C and showed no increase in surface roughness or pinholes.

: http://publica.fraunhofer.de/documents/N-596862.html