Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Development of a 3D-integrated thermocatalytic sensor for combustible gas detection
| SMSI 2020 - Sensor and Measurement Science International : Proceedings, 22-25 June 2020, Nuremberg, Germany, SMSI 2020 is cancelled due to COVID-19
Wunstorf: AMA Service, 2020
ISBN: 978-3-9819376-2-6
ISBN: 978-3-9819376-3-3
ISBN: 3-9819376-3-5
pp.77-78 |
| Conference "Sensor and Measurement Science International" (SMSI) <2020, Nuremberg/cancelled> |
| Fraunhofer-Gesellschaft FhG
Fraunhofer Internal Programs-Marktorientierte strategische Vorlaufforschung - MAVO; 836931; FluMEMS
MEMS-basierte katalytisch-thermische Sensoren für Gase und Flüssigkeiten |
| Bundesministerium für Bildung und Forschung BMBF (Deutschland)
16FMD01K |
| Bundesministerium für Bildung und Forschung BMBF (Deutschland)
16FMD02 |
| Bundesministerium für Bildung und Forschung BMBF (Deutschland)
16FMD03 |
|
| English |
| Conference Paper |
| Fraunhofer IMS () |
| thermocatalytic sensor; 3D-Integration; atomic layer deposition (ALD); post-CMOS; Pellistors |
Abstract
A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.