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2020
Conference Paper
Titel
Development of a 3D-integrated thermocatalytic sensor for combustible gas detection
Abstract
A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.
Author(s)
Project(s)
FluMEMS