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  4. Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
 
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2020
Conference Paper
Title

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Abstract
Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
Author(s)
Schwarz, F.
Senger, F.
Albers, J.
Malaurie, P.
Janicke, C.
Pohl, L.
Heinrich, F.
Kaden, D.
Quenzer, H.-J.
Lofink, F.
Bahr, A.
Wantoch, T. von
Hofmann, U.
Mainwork
MOEMS and Miniaturized Systems XIX  
Conference
Conference "MOEMS and Miniaturized Systems" 2020  
DOI
10.1117/12.2546035
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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