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Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

: Schwarz, F.; Senger, F.; Albers, J.; Malaurie, P.; Janicke, C.; Pohl, L.; Heinrich, F.; Kaden, D.; Quenzer, H.-J.; Lofink, F.; Bahr, A.; Wantoch, T. von; Hofmann, U.


Piyawattanametha, W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XIX : 1-3 February 2020, San Francisco, California
Bellingham, WA: SPIE, 2020 (Proceedings of SPIE 11293)
ISBN: 978-1-5106-3349-0
ISBN: 978-1-5106-3350-6
Paper 1129309, 17 pp.
Conference "MOEMS and Miniaturized Systems" <19, 2020, San Francisco/Calif.>
Conference Paper
Fraunhofer ISIT ()

Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.