Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and low Tg optical glass

: Yi, A.Y.; Chen, Y.; Klocke, F.; Pongs, G.; Demmer, A.; Grewell, D.; Benatar, A.


Journal of micromechanics and microengineering 16 (2006), No.10, pp.2000-2005
ISSN: 0960-1317
ISSN: 1361-6439
Journal Article
Fraunhofer IPT ()

Recent advances in compression molding of glass optical elements for mass production offer the potential of extending this technology to elements with micro and nano scale features. In this research, glass diffractive optical elements (DOEs) with lateral features in the order of 10 mu m and vertical height of 330 nm were fabricated using a fused silica glass mold and a special low T-g (glass transition temperature) glass material K-PG325. Molded DOEs were studied using an atomic force microscope (AFM) and scanning electron microscope (SEM) to evaluate the glass molding process capability. Optical testing of the molded DOEs was a further demonstration of the effectiveness of the molding process for high volume micro and diffractive optical component fabrication. The combination of two high-precision, high-volume processes, i.e., semiconductor batch process for optical mold making and glass molding for DOE replication, is an effective alternative manufacturing method for high-quality, low-cost optical components. The reported experiment is a detailed illustration of the glass molding process capability. With further process optimization a robust manufacturing process can be developed for mass production of diffractive and micro glass optical elements.