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HARMST, High Aspect Ratio Micro Structure Technology Workshop. Editorial

Gyenogju, Korea, 10-13 June 2005
 
: Kwon, T.H.; Michel, B.

:

Kwon, T.H.:
High Aspect Ratio Micro Structure Technology Workshop 2005. Special issue. Vol.1 : Gyenogju, Korea, 10 - 13 June 2005: HARMST
Berlin: Springer, 2007 (Microsystem technologies 13.2007, Nr.3/4)
pp.207
High Aspect Ratio Micro Structure Technology Workshop (HARMST) <2005, Gyenogju, Korea>
English
Conference Paper, Journal Article
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-59550.html