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AC powered reactive magnetron deposition of indium tin oxide (ITO) films from a metallic target
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2006
Journal Article
Titel
AC powered reactive magnetron deposition of indium tin oxide (ITO) films from a metallic target
Author(s)
Kupfer, H.
Kleinhempel, R.
Graffel, B.
Welzel, T.
Dunger, T.
Richter, F.
Gnehr, W.-M.
Kopte, T.
Zeitschrift
Surface and coatings technology
Konferenz
International Conference on Metallurgical Coatings and Thin Films (ICMCTF) 2006
DOI
10.1016/j.surfcoat.2006.08.004
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP