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Direct-writing of three-dimensional structures using laser-based processes

: Stuke, M.; Mueller, K.; Mueller, T.; Williams, K.; Oliver, R.; Ohlberg, D.A.A.; Fuhr, G.; Williams, R.S.

MRS Bulletin 32 (2007), No.1, pp.32-39
ISSN: 0883-7694
Journal Article
Fraunhofer IBMT ()

Three-dimensional structures of selected materials can be written directly to the precise locations required using laser exposure of suitable gaseous precursor mixtures. Writing speeds exceeding 50 mu m/s can be achieved. Examples presented in this work include the creation of a tiny time-of-flight laser ionization mass spectrometer, laser-driven movable micro-objects, and an ac electric-field microcage for storage, handling, and transferring small neutral objects in aqueous solution. The impact for laser-controlled site-selective growth of carbon nanotube cables is demonstrated.