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Short-time investigation of deposition processes

: Witke, Thomas; Siemroth, Peter; Schülke, Thomas; Schultrich, B.; Ott, Emil


Chang, Joon-Sung (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
21st International Congress on High-Speed Photography and Photonics 1994. Vol.2 : 29 August - 2 September 1994, Taejon, Korea
Bellingham, WA: SPIE, 1995 (Proceedings of SPIE 2513)
ISBN: 0-8194-1872-2
8 pp.
International Congress on High Speed Photography and Photonics <21, 1994, Daejeon>
Conference Paper
Fraunhofer IWS ()

The High Speed Framing Camera (HSFC) is a new high speed camera for investigations of processes in the ranges of nanoseconds and micrometers. This camera was designed especially for our studies of deposition processes. In pulsed laser deposition (PLD), vacuum arc deposition (VAD) and material deposition by channel spark the target material is evaporated and ionized in a fast process of some nanoseconds duration. New depositional applications require higher efficiency and modified plasma parameters. Therefore the processes of explosive plasma production must be studied with an adequate temporal and spatial resolution. The HSFC combines a microscopical resolution of 10 micrometers with a nanosecond time resolution and a very high optical sensitivity. Therefore a high resolution long-distance microscope QUESTAR is combined with a four channel intensifying CCD camera.