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  4. Thermal Annealing and Laser Treatment of Sol-gel Derived Zirconia Thin Films
 
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2020
Journal Article
Title

Thermal Annealing and Laser Treatment of Sol-gel Derived Zirconia Thin Films

Abstract
Soluble precursor powders were prepared from zirconium propoxide and acetylacetone by evaporation of volatile products directly after the hydrolysis step. Dissolution of the solid residue resulted in solutions that were further processed by dip coating on glass substrates. One set of as dried films was thermally annealed in an oven at temperatures between 300 and 600°C. In parallel, samples were irradiated by a CO2laser, in doing so laser power density and beam feed rate were varied. The thermally cured and laser treated film series were characterized with respect to film thickness, refractive index, phase content, crystallite size and film microstructure.
Author(s)
Jahn, Rainer  
Fraunhofer-Institut für Silicatforschung ISC  
Steenhusen, Sönke  
Fraunhofer-Institut für Silicatforschung ISC  
Löbmann, Peer  
Fraunhofer-Institut für Silicatforschung ISC  
Journal
Lasers in manufacturing and materials processing  
Open Access
DOI
10.1007/s40516-020-00119-x
Additional full text version
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Language
English
Fraunhofer-Institut für Silicatforschung ISC  
Keyword(s)
  • ZrO2

  • thin films

  • thermal curing

  • laser processing

  • microstructure

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