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Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

: Gehner, Andreas; Döring, S.; Rudloff, D.; Kunze, D.; Dürr, P.; Francés, S.; Hänsel, L.; Torlee, H.; Elgner, A.; Eckert, M.; Friedrichs, M.; Heber, J.; Schmidt, J.; Pufe, W.; Hohle, C.; Schulze, M.; Wagner, M.


Piyawattanametha, W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XIX : 1-3 February 2020, San Francisco, California
Bellingham, WA: SPIE, 2020 (Proceedings of SPIE 11293)
ISBN: 978-1-5106-3349-0
ISBN: 978-1-5106-3350-6
Paper 1129302, 10 pp.
Conference "MOEMS and Miniaturized Systems" <19, 2020, San Francisco/Calif.>
Conference Paper
Fraunhofer IPMS ()

The Fraunhofer IPMS has developed a novel 512 x 320 micro mirror array (MMA) consisting of 2axis-tip-tilt actuators at 48µm pitch with an underlying integrated analog CMOS address circuitry allowing a continuous pure tip-tilt motion up to 3.5° in arbitrary directions. In parallel, an external address electronic interface has been developed incorporating all necessary data pre-processing HW and SW for MMA programming with user-defined patterns. Besides a description of the device, the presentation will outline the actuator concept, its basic design and functionality as well as the employed surface micromachining process technology. It will also show characterization results demonstrating the overall device performance.