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Novel Concept for Heterogeneously Integrated High-Speed III-V Photodetector on Silicon Nitride Waveguide

: Keyvaninia, S.; Runge, P.; Schindler, A.; Beckerwerth, T.; Schell, M.


Helmy, A. ; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
IPC 2018, 31st Annual Conference of the IEEE Photonics Society : 30 September-4 October, Hyatt Regency Reston, Reston, VA, USA
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-5358-6
ISBN: 978-1-5386-5359-3
Photonics Conference (IPC) <31, 2018, Reston/Va.>
Conference Paper
Fraunhofer HHI ()

A novel design for heterogeneously integrated high-speed III-V photodetectors on the Si3N4 platform is proposed. This new approach offers a new platform to merge III-V and Si3N4 for 3D integration. The design is shown to have a high tolerance to bonding and lithography misalignment.