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2018
Conference Paper
Titel
Novel Concept for Heterogeneously Integrated High-Speed III-V Photodetector on Silicon Nitride Waveguide
Abstract
A novel design for heterogeneously integrated high-speed III-V photodetectors on the Si3N4 platform is proposed. This new approach offers a new platform to merge III-V and Si3N4 for 3D integration. The design is shown to have a high tolerance to bonding and lithography misalignment.
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