Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Multifunctional nanoparticles - key for optimizing chemical nanosensors

: Kock, A.; Deluca, M.; Sosada-Ludwikowska, F.; Wimmer-Teubenbacher, R.; Lackner, E.; Rohracher, K.; Wachmann, E.; Niehaus, J.S.; Becker, S.; Steinhauer, S.; Sowwan, M.; Singh, V.; Tokmak, Ö.


Breza, J. ; Institute of Electrical and Electronics Engineers -IEEE-:
12th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2018. Conference Proceedings : Smolenice, Slovakia, 21-24 October 2018
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-7490-1
ISBN: 978-1-5386-7489-5
ISBN: 978-1-5386-7491-8
ISBN: 978-1-5386-7488-8
International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) <12, 2018, Smolenice>
Conference Paper
Fraunhofer IAP ()

Multifunctional nanoparticles are key for optimizing the performance of chemical sensor devices. We have fabricated a variety of nanosensor devices based on ultrathin metal oxide films and nanowires, which have been integrated on CMOS-based micro-hotplate chips. These sensors have been functionalized with metallic as well as bimetallic nanoparticles. We have demonstrated that Pt-NPs or NiPt-NPs, strongly increase the sensitivity to carbon monoxide and suppress the cross selectivity to humidity in case of SnO 2 thin film based devices. We have employed both nanoparticles synthesized in solution, which are ink-jet deposited, as well as nanoparticles, which are implemented by gas phase synthesis directly on the micro-hotplate chips. The Pt-functionalized SnO 2 -thin film sensors show a strongly increased response to CO, which is almost independent of humidity as compared to the bare SnO 2 -thin film sensor. The highest response of more than 90% has been achieved with NiPt-functionalized SnO 2 -thin film sensors at a very low operation temperature of only 150°C.