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Design and Custom Fabrication of a Smart Temperature Sensor for an Organ-on-a-chip Platform

: Ponte, R.; Giagka, V.; Serdijn, W.A.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Circuits and Systems Society; IEEE Engineering in Medicine and Biology Society -EMBS-; IEEE Solid-State Circuits Society:
BioCAS 2018, Biomedical Circuits and Systems Conference. Conference Proceedings : Advanced systems for enhancing human health; Cleveland, Ohio, USA, October 17-19, 2018
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-3604-6
ISBN: 978-1-5386-3603-9
4 pp.
Biomedical Circuits and Systems Conference (BioCAS) <2018, Cleveland/Ohio>
Conference Paper
Fraunhofer IZM ()

This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The proposed circuit is developed to provide the first out-of-incubator temperature monitoring of cell cultures on an OOC platform in a monolithic fabrication. Measurement results on wafer reveal a temperature measurement resolution of less than ±0.2 °C (3σ) and a maximum nonlinearity error of less than 0.3% across a temperature range from 25 °C to 100 °C.