Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Impact of Vacuum Grippers Utilized for Automated Wafer Handling Prior a-Si Passivation for Silicon Heterojunction Solar Cells

: Fischer, A.; Moldovan, A.; Rentsch, J.


Poortmans, J. ; American Institute of Physics -AIP-, New York:
SiliconPV 2019, the 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium
New York, N.Y.: AIP Press, 2019 (AIP Conference Proceedings 2147)
ISBN: 978-0-7354-1892-9
Art. 050002, 7 pp.
International Conference on Crystalline Silicon Photovoltaics (SiliconPV) <9, 2019, Leuven>
Conference Paper
Fraunhofer ISE ()
Photovoltaik; Silicium-Photovoltaik; Oberflächen: Konditionierung; Passivierung; Lichteinfang; handling; effectors; SHJ

In this work the impact of grippers used in current photovoltaic mass production prior amorphous Silicon (a-Si) passivation for silicon heterojunction (SHJ) solar cells was investigated. Therefore large area Czochralski grown silicon (Cz-Si) wafers were handled by different types of vacuum grippers after cleaning and prior passivation. The study focuses on two aspects. The first focus is on the impact towards a-Si passivation caused by the interaction between gripper and wafer surface, measured by lifetime calibrated photoluminescence (PL) spectroscopy. The second focus lies on the optical and chemical analysis of the gripper affected wafer surface by scanning electron microscopy (SEM) and electron dispersive x-ray spectroscopy (EDX). It is demonstrated that particles can be considered as the main reason for gripper induced passivation defects. For passivation of wafers handled with cleaned vacuum based grippers with a surface out of a low contamination potential material it is shown, that the lifetime remains unchanged within a range of ± 0.2 ms on a level of 3 ms in comparison to a unhandled wafer.